Vacuum System
The vacuum system includes a vacuum pump, a vacuum detector, vacuum pipes, etc.
The vacuum pump adopts a two-stage rotary vane vacuum pump (60m^3/h), which is a two-stage pump with fast pumping speed, long service life and simple maintenance.
The vacuum detector uses a Japanese ULVAC vacuum gauge, which has a long service life and accurate detection.
Vacuum System
· Plasma Generation System
· Process Gas Control System
· Fully Automatic Control System